Atomic Layer Deposition (ALD) is widely used for thin protective coatings requiring high uniformity, conformality, and precise thickness control.
Key benefits include:
• Precision thickness control
Atomic-level control enables highly uniform and pinhole-minimized coatings.
• Conformal coating
Uniform coating of complex 3D structures and high aspect ratio geometries.
• Material versatility
Compatible with various materials including oxides, nitrides, and sulfides.
• Enhanced durability
Excellent thermal, chemical, and corrosion resistance.
• Barrier properties
Effective protection against moisture, oxidation, and aggressive process environments.
Typical applications:
• Corrosion protection
• Moisture barriers
• Semiconductor processing
• Optical and laser systems
• Functional surface protection
Key Specification:
One run all-around protective #ALD coating on sensitive fluorophosphate substrates d = 25.4mm
with AR @ 450-800nm, AOI: 0-10°, Avg R < 0.3%.
#Optical materials: Al2O3, TiO2, SiO2
2023.11.10
Key Specification:
All-around dense alumina (Al2O3) protective #ALD coating on gold mirror d = 20mm with HR @ 500-5500nm, AOI: 45°, Avg R > 96%.
#Optical material: Al2O3
2023.08.21
Key Specification:
All-around protective #ALD coating on iris-type adjustable gas flow controller d = 2.75" with yttria (Y2O3) sacrificial layer for dry etch applications.
2023.02.27
Key Specification:
All-around protective #ALD coating on vented M3 bolts with dense alumina-yttria laminates (Al2O3/Y2O3) for dry etch applications.
2023.01.20
Key Specification:
One run all-around enhanced #ALD coating on silver-plated polygonal mirrors d = 30mm with HR @ 532nm, AOI: 45°, R > 99%.
#Optical materials: Al2O3 + Ta2O5
2022.12.20
Key Specification:
All-around anti-tarnishing protective #ALD coating on Ag (silver) jewelry with HR @ 400-700nm.
#Optical materials: Al2O3, TiO2
2022.12.06
Key Specification:
All-around enhanced #ALD coating on parabolic aluminium mirrors d = 21mm with HR @ 550nm, AOI: 45°, R > 98%.
#Optical materials: Al2O3, Ta2O5
2022.12.02
Key Specification:
All-around protective #ALD coating on lift pins with dense alumina (Al2O3) for dry etch applications.
2022.11.21
Key Specification:
All-around protective #ALD coating on off-axis parabolic aluminium collimators d = 8mm with HR @ 808nm, AOI: 0-30°, R > 99%
#Optical materials: Al2O3, Ta2O5
2022.11.09